Contemporary Materials I−2 (2010)
Contemporary Materials I−2 (2010) Page 138 of 143
GAS DISCHARGE STATIC CHARACTERISTICS IN PULSE REGIME
M. Zlatanović,* I. Popović
University of Belgrade, School of Electrical Engineering, Bulevar Kralja Aleksandra 73, 11120 Belgrade, Serbia
Abstract:
The application of pulse DC power supply resulted in a significant advance of plasma surface processing of materials compared to continuous DC supply. The synthesis of new materials and various surface structures formation was provided, as well as a reliable operation due to introduction of new process parameters such as pulse frequency and duty cycle and due to suppression of glow-to-arc transitions. As a result, physical and chemical processes on the material surface can be controlled by new pulse generator parameters, but their complex dependence on cathode physical properties and cathode geometry, as well as on working gas composition remained. On the other hand, time and space process efficiency is to some extent lowered compared to continuous DC plasma treatment due to periodic transition to the stationary state. In order to improve process efficiency, pulse generator parameters should be set to provide system transition to the stationary state during the pulse period.
In this paper we investigated gas discharge static characteristics, after the discharge spread over the whole cathode surface. It was found that static discharge characteristics were mostly dependent on the working pressure. The static resistance of the discharge decreased with increasing of discharge voltage and decreasing the cathode temperature. It was concluded that the cathode heating can be performed at the constant discharge current by slowly increasing pulse power supply voltage.
Keywords: gas discharge, static characteristics, pulse plasma processes, surface treatment.
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